Micro/nano technology is indispensable for making advanced semiconductor devices. This course is designed to cover the state-of-the-art micro/nanotechnologies for the fabrication of VLSI/ULSI including BJT, CMOS, and BiCMOS. This course will emphasize fundamental science and technology used in modern semiconductor devices. Topics of technology will include cleaning, chemical etching, oxidation, diffusion, plasma etching, reactive ion etching (RIE), focused ion-beam (FIB) etching, thin-film deposition, metallization, advanced photolithography, etc.